发明名称 |
Gas delivery apparatus and method for monitoring a gas phase species therein |
摘要 |
Provided are novel gas delivery apparatuses. In accordance with one aspect of the invention, the apparatus features: a gas line network for delivering a gas from a gas source to a point of use; means for performing one or more vacuum/purge cycle in the gas line network, the vacuum/purge cycle including a vacuum phase and a purge phase; and a measurement system for detecting a gas phase molecular species in the gas line network during the vacuum phase and/or the purge phase of the vacuum/purge cycle. Also provided are methods for monitoring a gas phase molecular species in a gas delivery apparatus. The invention allows for replacement of components in a gas delivery system in a manner which is safe, and which avoids detrimental impact on the process being run and on the equipment.
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申请公布号 |
US2002152797(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20020035179 |
申请日期 |
2002.01.04 |
申请人 |
MCANDREW JAMES J.F.;DUCHATEAU ERIC L.;GIRARD JEAN-MARC;ZDUNEK ALAN D. |
发明人 |
MCANDREW JAMES J.F.;DUCHATEAU ERIC L.;GIRARD JEAN-MARC;ZDUNEK ALAN D. |
分类号 |
F17D1/04;G01N21/35;G01N21/39;(IPC1-7):G01N29/02 |
主分类号 |
F17D1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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