SORTING METHOD AND OBSERVATION METHOD FOR IMAGE AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an automatic image collector and a method thereof which enable to obtain and sort images of defective parts automatically at a higher speed as for defects generated in the production process of semiconductor wafers as detected with a defect inspection instrument. SOLUTION: In the image collector which automatically takes and collects images a plurality of parts to be observed on semiconductor wafers, there are arranged a scheduling part which determines the order of photographing defects and the moving speeds of stages based on the positional relationship of the plurality of parts to be observed on the wafers, and a control unit which feeds back the movement of the stages to the degree of deflection of beams. This enables to take and collect images in the optimum routes while moving the stages.