发明名称 |
CONTACT DEVICE AND CONTACT PROBE PROVIDED WITH THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To enable to be in contact with a measured object, and easily and rapidly respond when contact failure occurs. SOLUTION: A conductive connection part 4a connected to the measured object 2 in a conductive state is included. A contact device C for conducting a contact surface 2a of the measured object 2 and the conductive connection part 4a by abutting on the contact surface 2a of the measured object 2 and the conductive connection part 4a is detachably arranged.
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申请公布号 |
JP2002311056(A) |
申请公布日期 |
2002.10.23 |
申请号 |
JP20010108298 |
申请日期 |
2001.04.06 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
MASUDA AKIHIRO;SUGIYAMA TATSUO;MISHIMA TERUSHI |
分类号 |
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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