发明名称 CONTACT DEVICE AND CONTACT PROBE PROVIDED WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To enable to be in contact with a measured object, and easily and rapidly respond when contact failure occurs. SOLUTION: A conductive connection part 4a connected to the measured object 2 in a conductive state is included. A contact device C for conducting a contact surface 2a of the measured object 2 and the conductive connection part 4a by abutting on the contact surface 2a of the measured object 2 and the conductive connection part 4a is detachably arranged.
申请公布号 JP2002311056(A) 申请公布日期 2002.10.23
申请号 JP20010108298 申请日期 2001.04.06
申请人 MITSUBISHI MATERIALS CORP 发明人 MASUDA AKIHIRO;SUGIYAMA TATSUO;MISHIMA TERUSHI
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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