SURFACE INSPECTING DEVICE AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a surface inspecting device and method capable of making a light shielding plate appropriately follow the movement of an edge of a body to be inspected. SOLUTION: The surface inspecting device irradiates the band-shaped body to be inspected 50 continuously travelling in a Z direction with inspecting light from a light projector arranged at an interval from a surface of the body to be inspected 50 along a Y direction which intersects the surface at right angles, and at an interval from an outer end in the widthwise direction of the body to be inspected to its inside along an X direction which intersects the Z direction and the Y direction at right angles. Light is detected via the body to be inspected 50 by a light receiver 15 to inspect surface defects of the body to be inspected 50. The surface inspecting device is provided with a light shielding means 20 which comprises both a light shielding member 21 arranged between the light projector and the body to be inspected 50 for blocking the inspecting light directed from the outer end in the widthwise direction of the body to be inspected 50 toward outside, and a moving means 23 for moving the light shielding plate 21 in the X direction and the Y direction.