METHODS FOR MAKING NEARLY PLANAR DIELECTRIC FILMS IN INTEGRATED CIRCUITS,申请号KR1020027011717-传众专利搜索

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发明名称	METHODS FOR MAKING NEARLY PLANAR DIELECTRIC FILMS IN INTEGRATED CIRCUITS
摘要
申请公布号	KR20020080474(A)	申请公布日期	2002.10.23
申请号	KR1020027011717	申请日期	2002.09.06
申请人		发明人
分类号	H01L21/3105	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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