摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a glass waveguide and a method for manufacturing the waveguide in which changes in the form of a light-propagating layer is suppressed and a light-propagating layer having high dimensional accuracy can be formed. SOLUTION: The light-propagating layer 2 is formed by forming a reflection film mask pattern 3A which reflects a laser beam on the surface of a glass 1 and irradiating the inner part of the glass 1 with femtosecond laser beams 7 through the reflection film mask pattern 3A. The reflection film mask pattern 3A is formed by the process of manufacturing a semiconductor on the glass surface. |