发明名称 VISUAL INSPECTION DEVICE FOR BOARD
摘要 PROBLEM TO BE SOLVED: To provide an inspection device of a compact constitution from a human engineering viewpoint. SOLUTION: A microscope viewing part (2a) and observation regions (11, 12) are arranged with reference to an operating position (P) in such a way that the part (2a) can be seen vertically from the operating position (P) in a first observation direction (A) and that one from among the observation regions (11, 12) can be seen nearly vertically in at least one from among other observation directions (B, B'). The direction (A) and the directions (B, B') form acute angles (α,α') respectively.
申请公布号 JP2002310931(A) 申请公布日期 2002.10.23
申请号 JP20020008719 申请日期 2002.01.17
申请人 LEICA MICROSYSTEMS JENA GMBH 发明人 URBAN KARSTEN
分类号 G01N21/956;G02B21/00;G02B21/18;G02B21/24;G02B21/26;H01L21/66;(IPC1-7):G01N21/956 主分类号 G01N21/956
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