发明名称 REGENERATION METHOD OF SLUDGE FOR WIRE SAW CUTTING
摘要 PURPOSE: A regeneration method of sludge for wire saw cutting is provided to regenerate sludge used in a cutting process using a wire saw by using a decanter and a centrifugal separation method. CONSTITUTION: A used sludge is transferred by a transport apparatus such as a tank lorry. The used sludge is transferred and stored to a storage tank(T1) by a pump(P1). The used sludge is transferred to mixing baths(T21,T22) by a transfer pump(P2). The transfer pump(P2) is stopped and control valves(V2,V3) are closed if the used sludge is filled up in the mixing baths(T21,T22). Coolant supply valves(V1,V4) are opened and coolant is supplied from a coolant storage tank(T4). The used sludge and the coolant are mixed and stirred within the mixing baths(T21,T22). The mixed material of the sludge and the coolant is transferred to a decanter(D1) by a quantitative pump(P3). The mixed material is divided into the sludge and the coolant by a centrifugal separation method using the decanter(D1). The divided sludge is mixed with a regenerated coolant in a mixing bath(T42). The remaining amount of coolant is transferred to the second decanter(D3). The redivided coolant is transferred and stored to a coolant storage tank(T4). The regenerated coolant is transferred to the outside.
申请公布号 KR20020080195(A) 申请公布日期 2002.10.23
申请号 KR20010019622 申请日期 2001.04.12
申请人 KIM, CHOL WON 发明人 KIM, CHOL WON
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址