METHOD FOR MANUFACTURING QUARTZ CRYSTAL PLATE AND QUARTZ CRYSTAL PLATE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a quartz crystal plate which is capable of efficiently working the quartz crystal plate to an extremely thin plate, and the quartz crystal plate. SOLUTION: The method for manufacturing the quartz crystal plate which manufactures the quartz crystal plate for quarts crystal oscillators by making a quartz crystal plate blank thinner comprises mechanically grinding the quartz crystal plate 7B from which the quartz crystal plate blank 7a is separated, then removing a work strained layer 7a produced on the ground surface and using a gaseous mixture containing a gaseous fluorine system and helium or a gaseous mixture containing the gaseous fluorine system and hydrogen as the plasma generating gas in plasma etching treatment to be performed in order to make the quartz crystal plate further thinner. As a result, the extremely thin quartz crystal plate 7 corresponding to a high-frequency can be efficiently manufactured at a high yield.