GONIOMETER FOR X-RAY DIFFRACTION DEVICE

摘要

PROBLEM TO BE SOLVED: To heighten the precision of angle control and smooth the rotation of rotational axes in comparison with a conventional device using a pulse motor and a worm mechanism by rotating and driving a first rotation axis and a second rotation axis with supersonic motors respectively. SOLUTION: A first supersonic motor 62 is located between a first flange 42 of a θ rotation axis 32 and a casing 30. The first supersonic motor 62 consists of a stator 54 shaped like a ring and a rotor 66 shaped like a hollow disc. The stator 64 consists of a piezoelectric body 68 shaped like a ring and an elastic body 70 shaped like a ring, which are fixed on the casing 30. The inner end of the radial direction in the rotor 66 is fixed on the first flange 42 and the outer end of it is a free end. The upper surface of the elastic body 70 shaped like a ring is in contact with the lower surface of the free end. The rotor 66 is made of a spring material and the outer end of it can elastically move in a vertical direction. The second supersonic motor 76 has the same structure as that of the first one 62.