发明名称 Controlling the thickness of an evaporated or sublimed organic layer during production of an organic light-emitting device
摘要 Apparatus for monitoring and controlling formation of organic layers by physical vapor deposition of organic materials in making organic light-emitting devices is disclosed. <IMAGE>
申请公布号 EP1251189(A1) 申请公布日期 2002.10.23
申请号 EP20020076381 申请日期 2002.04.08
申请人 EASTMAN KODAK COMPANY 发明人 VAN SLYKE, STEVEN A.;MARCUS, MICHAEL A.;SPOONHOWER, JOHN P.;SPAHN, ROBERT G.;FREEMAN, DENNIS R.
分类号 H05B33/10;C23C14/12;C23C14/54;H01L51/50 主分类号 H05B33/10
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