发明名称 |
Controlling the thickness of an evaporated or sublimed organic layer during production of an organic light-emitting device |
摘要 |
Apparatus for monitoring and controlling formation of organic layers by physical vapor deposition of organic materials in making organic light-emitting devices is disclosed. <IMAGE> |
申请公布号 |
EP1251189(A1) |
申请公布日期 |
2002.10.23 |
申请号 |
EP20020076381 |
申请日期 |
2002.04.08 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
VAN SLYKE, STEVEN A.;MARCUS, MICHAEL A.;SPOONHOWER, JOHN P.;SPAHN, ROBERT G.;FREEMAN, DENNIS R. |
分类号 |
H05B33/10;C23C14/12;C23C14/54;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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