发明名称 |
Edge-gripping pre-aligner |
摘要 |
An apparatus for holding and orienting a wafer having an alignment feature, and including a movable robot arm; and an end effector attached to an end of the robot arm, the end effector including a gripping mechanism which during operation both holds the wafer and rotates it about an axis that is perpendicular to the plane of the wafer and a sensing element for detecting the alignment feature on the wafer as the gripping mechanism rotates the wafer past the sensing element.
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申请公布号 |
US6468022(B1) |
申请公布日期 |
2002.10.22 |
申请号 |
US20000609342 |
申请日期 |
2000.07.05 |
申请人 |
INTEGRATED DYNAMICS ENGINEERING, INC. |
发明人 |
WHITCOMB PRESTON |
分类号 |
B25J15/08;B65G49/07;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B25J15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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