发明名称 Positioning stage
摘要 A positioning device and method for positioning objects is provided. The device includes a movable stage and a pair of levers. The pair of levers is symmetric about a first axis of the movable stage. Additionally, the pair of levers is parallel to a second axis of the movable stage. This second axis is perpendicular to the first axis. Each of the pair of levers applies a force to the movable stage. Each of the pair of levers moves in an arc. The two levers move in opposite directions along their respective arc. The two arcs are symmetrical about an axis of the movable stage.
申请公布号 US6467761(B1) 申请公布日期 2002.10.22
申请号 US20000597243 申请日期 2000.06.20
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCE;THE 14TH AND CONSTITUTION NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 发明人 AMATUCCI EDWARD G.;DAGALAKIS NICHOLAS G.;MARCINKOSKI JASON;SCIRE FREDERIC E.;KRAMAR JOHN A.
分类号 B23Q1/34;B23Q1/48;B23Q1/62;G02B6/42;G02B7/00;G02B21/26;G02B26/00;(IPC1-7):B23Q3/18 主分类号 B23Q1/34
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