PLASMA PROCESSING APPARATUS WITH AN ELECTRICALLY CONDUCTIVE WALL,申请号KR1020027006303-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS WITH AN ELECTRICALLY CONDUCTIVE WALL
摘要
申请公布号	KR20020079738(A)	申请公布日期	2002.10.19
申请号	KR1020027006303	申请日期	2002.05.16
申请人		发明人
分类号	H05H1/30	主分类号	H05H1/30
代理机构		代理人
主权项
地址

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