发明名称 |
MANUFACTURING METHOD FOR ACTIVE ELEMENT ARRAY BOARD |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide an active element array board capable of preventing a short circuit between packaged terminals even if a thick interlayer insulating film is used, without changing tact in manufacturing, and to provide a manufacturing method therefor. SOLUTION: Even when the interlayer insulating film 7 is formed thick, the resist residues in the pointed projecting parts 7c provided between the packaged terminals 6a which are the interlayer insulating film end parts 7b and adjoin each other, are eliminated.</p> |
申请公布号 |
JP2002303889(A) |
申请公布日期 |
2002.10.18 |
申请号 |
JP20010375614 |
申请日期 |
2001.12.10 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
HIROSE TAKASHI;TAMURA TATSUHIKO;TSUBOI NOBUYUKI |
分类号 |
G02F1/1368;G02F1/1345;G09F9/30;H01L21/3205;H01L21/336;H01L29/786;(IPC1-7):G02F1/136;H01L21/320 |
主分类号 |
G02F1/1368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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