| 摘要 |
PROBLEM TO BE SOLVED: To favorably measure atmospheric state, vacuum atmospheric state and helium gas atmospheric state with one device. SOLUTION: A fluorescent X-ray analyzer 1 comprises a measurement section 2 and a mobile section 3. The section 2 comprises a measurement chamber 2a having a first opening 2b, an X-ray source 2c to apply primary X-rays toward the first opening, an X-ray detector 2e to detect secondary X-rays, suction/ exhaust means 2g to suction/exhaust inside the measurement chamber, and gas introduction means 2j to introduce gas into the measurement chamber. The section 3 has a second open opening 3a and a third opening 3b extendingly mounting a thin film 3c. The second and third openings are separately aligned with the first opening of the measurement section. By individually aligning the second opening or the third opening with the first opening, measurement is performed in each state of atmospheric state, vacuum atmospheric state or gas atmospheric state.
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