| 摘要 |
PROBLEM TO BE SOLVED: To provide an adhesion preventive member for a vacuum treating apparatus, capable of reducing a labor hour and man-power of a maintenance work, and to provide the vacuum treating apparatus. SOLUTION: The adhesion preventive member 9 for the vacuum treatment apparatus prevents adhesion of contaminants to the inner surface of a treating chamber in the apparatus. In the member 9, a developed adhesion preventive member, in which one sheet-like shielding material is cut to meet a flat surface developing shape of the inner surface of a cover 4, is assembled stereoscopically, and fixed to the inner surface of the cover 4 by an adhesive layer. Both ends of an arc surface 9c of a flat surface 9a, stereoscopic part 9b and the arc surface 9c, corresponding to a ceiling surface 4a, inside wall face 4b and corner of the cover 4 in the planar shape are partly cut to a cut-out part 9d. In a state in which the member 9 is mounted at the cover 4, a space closed by the member 9 communicates with the closed space in the cover 4 via the cut-out part 9d. Thus, the member 9 can be constituted of the one shielding material.
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