发明名称 PAD STRUCTURE FOR SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a pad structure for semiconductor device and a production method therefor, with which highly reliable bond lift measures are taken onto a pad surface. SOLUTION: An electrode pad PAD is a practical alminium layer 11 connected with an internal conductive region, formed on a layer insulating film 10, such as SiO2 film and configured to be exposed on the opening part of a passivation film 12 of the top layer. A bonding wire not shown is connected to the electrode pad PAD, for example. The pattern exposure plane of the electrode pad PAD is configured, while having a rugged form by being reflected with a rugged pattern 101 formed on a layer insulating film 10 of the lower layer. Because of the rugged form, the connection area of the bonding wire is expanded. Further, the contact area of the alminium layer 11 and the layer insulating film 10 is increased due to the rugged pattern 101.
申请公布号 JP2002305217(A) 申请公布日期 2002.10.18
申请号 JP20010107952 申请日期 2001.04.06
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI HIROBUMI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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