| 摘要 |
PROBLEM TO BE SOLVED: To provide an index head of a semiconductor element test handler which quickly controls the pressing force and the temperature of a semiconductor element to smoothly position and arrange it, thereby quickly performing the index operation. SOLUTION: The index head of a semiconductor element test handler comprises a carrier base 10 fixed to a carrier, an elevator carrier 20 vertically movably mounted on the carrier base, a head holder 30 coupled with the elevator carrier bottom movably relative to the elevator carrier and a plurality of heads 40 each having a holder 41 for sucking and holding a semiconductor element, a heater 42 for directly transferring heat to the semiconductor element, and a compliance unit 43 having a degree of freedom for arranging between the semiconductor element and testing sockets. |
