发明名称 ELASTIC WAVE ELEMENT AND METHOD FOR FABRICATING THE SAME
摘要 An elastic wave element comprising a piezoelectric, at least one electrode formed on the piezoelectric, a corrosion resistant layer formed on the surface of the electrode, a hydrophilic film formed on the corrosion resistant layer, and a dielectric film formed on the hydrophilic film. Since the corrosion resistant layer is composed of a compound of the electrode material and the hydrophilic film is composed of a material exhibiting higher hydrophilicity than the dielectric film, the corrosion resistant layer, the hydrophilic film and the dielectric film prevent corrosion of the electrode due to atmospheric moisture.
申请公布号 WO02082645(A1) 申请公布日期 2002.10.17
申请号 WO2001JP10828 申请日期 2001.12.11
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA;YAMADA, AKIRA;MAEDA, CHISAKO;MIYASHITA, SHOJI;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;SAKAI, ATSUSHI;YOSHIDA, KENJI 发明人 YAMADA, AKIRA;MAEDA, CHISAKO;MIYASHITA, SHOJI;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;SAKAI, ATSUSHI;YOSHIDA, KENJI
分类号 H03H3/08;H03H9/02;(IPC1-7):H03H9/145 主分类号 H03H3/08
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