摘要 |
An elastic wave element comprising a piezoelectric, at least one electrode formed on the piezoelectric, a corrosion resistant layer formed on the surface of the electrode, a hydrophilic film formed on the corrosion resistant layer, and a dielectric film formed on the hydrophilic film. Since the corrosion resistant layer is composed of a compound of the electrode material and the hydrophilic film is composed of a material exhibiting higher hydrophilicity than the dielectric film, the corrosion resistant layer, the hydrophilic film and the dielectric film prevent corrosion of the electrode due to atmospheric moisture.
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申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;YAMADA, AKIRA;MAEDA, CHISAKO;MIYASHITA, SHOJI;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;SAKAI, ATSUSHI;YOSHIDA, KENJI |
发明人 |
YAMADA, AKIRA;MAEDA, CHISAKO;MIYASHITA, SHOJI;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;SAKAI, ATSUSHI;YOSHIDA, KENJI |