| 摘要 |
A triaxial sensor is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration is used. Each substrate (705,710) includes three accelerometers (715,785) that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes (720) of the accelerometers (715) of the first substrate (705) are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes (790) of the accelerometers (785) of the second substrate (710) are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along the same three skewed axes but oppositely directed. The sensing axes (720,790) of the first and second substrates are aligned to prevent angular acceleration sensitivity. <IMAGE> |
