| 发明名称 |
Method of manufacturing an antifuse |
| 摘要 |
<p>Cleaning metal/alpha -Si-metal antifuse contacts comprises: placing a reaction metal at the interface of a metal/alpha -Si/metal antifuse contact; reacting the reaction metal at a temp. =450[deg] C. to remove the native interface layer of the antifuse, to clean the antifuse contact.</p> |
| 申请公布号 |
EP0662712(B1) |
申请公布日期 |
2002.10.16 |
| 申请号 |
EP19950100126 |
申请日期 |
1995.01.05 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
KWOK, SIANG PING;WANG, SHOUE JEN |
| 分类号 |
H01L21/82;H01L21/768;H01L23/525;(IPC1-7):H01L23/525 |
主分类号 |
H01L21/82 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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