摘要 |
A gas sensor, comprises a substrate, a sensor unit including a functional layer and an electrode structure, and an electric heating and/or temperature measuring arrangement. An electrically conductive shielding structure is provided between the sensor unit and the electric heating arrangement in order to shield the measurement process at the sensor unit from interferences owing to the heating process, thereby reducing or preventing the effects of electrical fields caused by voltages applied to the heating arrangement from altering or disrupting the measurement process.
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