| 摘要 |
PURPOSE: A nano thin film type humidity sensor is provided to reduce manufacturing cost and achieve improved sensitivity of the sensor by using a spin coating and annealing process. CONSTITUTION: A nano thin film type humidity sensor is manufactured by using a potassium tantalate coating liquid which is produced from potassium ethoxide and tantalum ethoxide used as a raw material, after performing a hydrolysis, deflocculation and hydrothermal treatment to the raw material. The potassium tantalate coating liquid is spin coated by two times to an alumina(Al2O3) substrate deposited with a silver electrode, and a heat treatment is performed for every completion of the coating, for 5 minutes at the temperature of 300 Deg.C. An annealing process is performed for each sample after completion of the final coating, for 30 minutes at the temperature of 300, 500, 800 and 1000 Deg.C, respectively. Thus-obtained thin film has a porous structure, and a thickness of 185 to 306nm, where the particle size is 13.2 to 31nm.
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