发明名称 PULSE DISCHARGE DEVICE AND LASER DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a pulse discharge device which can generate uniform glow discharge between main discharge electrodes. SOLUTION: The output of a partial circuit 32 (n-1) of a magnetic pulse compression circuit 30 is connected with corona pre-discharging electrodes 45 and 46, by means of a connection 51. As a result, a semi-compression pulse is applied to both corona pre-discharging electrodes 45 and 46 at a timing earlier than both main discharging electrodes 42 and 43, that time is required to charge a partial circuit 32 (n) in a final step, so that the pre-discharging from both corona preliminary discharging electrodes 45 and 46 to main discharging electrode 43 can be sufficiently conducted more quickly than in regular discharging. Through the pre-discharging, electrons can be injected into a space region between both the main discharging electrodes 42 and 43, prior to glow discharging between them, and special uniform glow discharging can be realized between them.
申请公布号 JP2002299732(A) 申请公布日期 2002.10.11
申请号 JP20010103172 申请日期 2001.04.02
申请人 SUMITOMO HEAVY IND LTD 发明人 KAWAMURA JOICHI;CHIJIIWA TOSHIHIKO
分类号 H01S3/0977;H01S3/038;H01S3/097;(IPC1-7):H01S3/097 主分类号 H01S3/0977
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