发明名称 THERMAL INFRARED DETECTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a thermal infrared detecting element that can obtain an appropriate temperature characteristic, at a temperature higher than the room temperature. SOLUTION: This thermal infrared detecting element is provided with an insulation foundation layer 8 having a crystal structure and a bolometer thin film 9 grown epitaxially on the layer 8. The thin film 9 is composed of a material expressed by the chemical formula of Ca2-x Srx RuO4-d (where, 0<=x<=0.05 and (d) denotes a value indicating the deviation from stoichiometry of oxygen) and has a lattice constant, which is different from that of the foundation layer 8.
申请公布号 JP2002299703(A) 申请公布日期 2002.10.11
申请号 JP20010097118 申请日期 2001.03.29
申请人 TOSHIBA CORP 发明人 IKEGAWA SUMIO
分类号 G01J1/02;G01J1/42;G01J5/02;G01J5/20;G01J5/48;H01L27/14;H01L37/00;(IPC1-7):H01L37/00 主分类号 G01J1/02
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