摘要 |
PROBLEM TO BE SOLVED: To provide a thermal infrared detecting element that can obtain an appropriate temperature characteristic, at a temperature higher than the room temperature. SOLUTION: This thermal infrared detecting element is provided with an insulation foundation layer 8 having a crystal structure and a bolometer thin film 9 grown epitaxially on the layer 8. The thin film 9 is composed of a material expressed by the chemical formula of Ca2-x Srx RuO4-d (where, 0<=x<=0.05 and (d) denotes a value indicating the deviation from stoichiometry of oxygen) and has a lattice constant, which is different from that of the foundation layer 8.
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