| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cassette that can effectively inhibit the mixture of impurities to a substrate, a substrate contamination-preventing apparatus, and the manufacturing method of a semiconductor device. SOLUTION: The substrate cassette is used in the manufacture of the semiconductor device, and has an accommodation section 5 for accommodating the substrate 1, an opening 2c for taking in and out the substrate, and a gas supply port 3 for supplying gas to the accommodation section. |
