发明名称 MACHINING METHOD FOR WORKPIECE
摘要 PROBLEM TO BE SOLVED: To prevent a decrease in product quality by preventing a workpiece from being contaminated due to adhered contaminants on an adhesive tape when machining the workpiece stuck on the adhesive tape stuck on a frame. SOLUTION: In a machining method for a workpiece, the workpiece W1 united with the frame 30 via the adhesive tape 31 is machined by sticking the workpiece W1 on an adhesive surface 31a of the adhesive tape 31 stuck on the frame 30 so as to close an aperture of the ring-like frame 30. An UV curing type adhesive tape is used as the adhesive tape 31, in which the adhesive surface is constructed by applying an adhesive which decreases in adhesive power and is cured, by having the surface of a sheet member irradiated with UV light. By irradiating the adhesive surface 31a of the UV curing type adhesive tape with the UV light, the adhesive power of an unused region of the adhesive surface 31a on which the frame and the workpiece are not stuck is decreased to cure the region, and then the workpiece is machined.
申请公布号 JP2002299295(A) 申请公布日期 2002.10.11
申请号 JP20010099532 申请日期 2001.03.30
申请人 DISCO ABRASIVE SYST LTD 发明人 TAKAHASHI TOSHIAKI
分类号 H01L21/304;H01L21/301;(IPC1-7):H01L21/304 主分类号 H01L21/304
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