| 摘要 |
PROBLEM TO BE SOLVED: To enhance use efficiency of a magnetic metal material. SOLUTION: First and second cooling can rolls 16, 17 are arranged by being mutually approximated, one evaporation source 18 to supply steam flow 19a of the magnetic metal material is installed in the lower direction of the first and second can rolls, first and second minimum incident angle regulation masks 28, 26 are provided in the vicinity of the first and second cooling can rolls 16, 17 respectively, one maximum incident angle regulation mask 25 is provided in the upper direction of an interval between the first and second cooling can rolls 16, 17, a nonmagnetic ground film is formed on a base film 12 as progressively increasing an incident angle of vapor flow 19a of the magnetic metal material to the base film 12 on the upstream side in a track, a ferromagnetic metal thin film is further formed on the nonmagnetic ground film as progressively reducing the incident angle of the vapor flow of the magnetic metal material to the base film 12 on the downstream side in the track.
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