发明名称 |
Confocal 3D inspection system and process |
摘要 |
A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response.
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申请公布号 |
US2002145734(A1) |
申请公布日期 |
2002.10.10 |
申请号 |
US20020073426 |
申请日期 |
2002.02.11 |
申请人 |
WATKINS CORY;VAUGHNN DAVID;BLAIR ALAN |
发明人 |
WATKINS CORY;VAUGHNN DAVID;BLAIR ALAN |
分类号 |
G01N21/88;G01N21/95;G02B21/00;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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