| 摘要 |
<p>A method for producing a powder of ITO having indium oxide and tin dissolved therein, characterized in that a mixed solution or slurry of indium nitrate and tin chloride having concentrations of indium and tin of 3.0 mol/L or more is subjected to the spray pyrolysis to thereby form an ITO powder. The method allows the production, at a lower cost, of an ITO powder having tin dissolved in indium oxide and being excellent in dispersibility and of an ITO target being close and excellent in homogeneity, which results in the suppression of the lowering of quality and the formation of abnormal projections such as nodules both of which are frequently caused when uniform film formation by ITO sputtering is not achieved.</p> |
