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发明名称
INTEGRATED CMOS CAPACITIVE PRESSURE SENSOR
摘要
A capacitive pressure sensor (10) utilizes a diaphragm (38) that is formed along with forming gates (56,57) of active devices on the same semiconductor substrate (11).
申请公布号
WO0248668(A3)
申请公布日期
2002.10.10
申请号
WO2001US44013
申请日期
2001.11.19
申请人
MOTOROLA, INC.
发明人
GOGOI, BISHNU, P.;MONK, DAVID, J.;ODLE, DAVID, W.;NEUMANN, KEVIN, D.;HUGHES, DONALD, L., JR.;SCHMIESING, JOHN, E.;MCNEIL, ANDREW, C.;AUGUST, RICHARD, J.
分类号
G01L9/00;H01L21/8234;H01L27/06;H01L29/84
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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