| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of effectively damping the vibration generated in the vacuum pump, and having a damper with small reduction in conductance, and the damper. SOLUTION: The sectional area of an exhaust gas flow passage from an opening part of a damper to an inlet of the vacuum pump is set to be larger than the sectional passage of the suction port of a vacuum pump. In addition, by disposing a vibration absorbing unit of the damper around a casing of a vacuum pump, the distance from the inlet of the vacuum pump to a vacuum device to be evacuated by the vacuum pump can be reduced.
|
