| 摘要 |
PROBLEM TO BE SOLVED: To efficiently suck particles, and to stabilize a microwave plasma to reduce variation in measurement. SOLUTION: A filter 1 is provided which arranges particles 10 to be measured below a sucking nozzle 4 in a disperser 5 for keeping in an He gas atmosphere. Further, there are provided a pressure gauge 5c which measures an internal pressure of the disperser 5, and a flow-rate controller which controls the flow rate of He gas to the disperser 5 so that the internal pressure of the disperser 5 comes to be a specified value higher than a plasma generating part while controlling the flow rate of the He gas in the disperser 5 to keep a specified interval between the filter 1 and the sucking nozzle 4, for alignment. A diameter is almost constant, as a pipe, from the sucking nozzle 4 to a plasma guiding-in part 14, with a connection member provided so that the sucking nozzle 4 is continuously connected to the plasma guiding-in part 14.
|
