A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same,申请号GB20020020466-传众专利搜索

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发明名称	A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same
摘要
申请公布号	GB0220466(D0)	申请公布日期	2002.10.09
申请号	GB20020020466	申请日期	2001.04.06
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人
分类号	H01L21/677	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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