| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor capable of mitigating or cutting off a thermal influence from a pedestal with a comparatively simple structure, preventing the generation of a vortex and executing highly accurate measurement. SOLUTION: This flow sensor 1 is constituted from a flow detection element 6 on which a temperature detection means 33 for detecting the temperature of a fluid 11 is installed, a pedestal 5 on which the flow detection element 6 is mounted, and sealing glass 3 for sealing the pedestal 5 in a case 2, or the like. The pedestal 5 is formed from glass, ceramics or the like, having a melting point higher than the sealing glass 3, and a passage groove 15 is formed on the upper face of the pedestal 5, and the flow detection element 6 is locked thereon. The lower end part of the pedestal 5 is positioned in the sealing glass 3.</p> |
