摘要 |
<p>In a casing, there are mounted voice coil motors in a direction z, voice coil motors in directions x and y, and zoom units. A probe is supported by support means including a spindle, first and second springs, an intermediate cylinder, a viscous element, a thicker tube portion and a thinner tube portion. The forces, as generated by the voice coil motors in the directions x and y, are transmitted through a spindle and so on to the thicker tube portion. In response to these forces, the thicker tube portion rocks on the thinner tube portion. The leaf spring of the x- and y-direction zoom units realizes the zooming function by supporting a portion of the spindle elastically. <IMAGE></p> |