发明名称 Probe Scanning Apparatus
摘要 <p>In a casing, there are mounted voice coil motors in a direction z, voice coil motors in directions x and y, and zoom units. A probe is supported by support means including a spindle, first and second springs, an intermediate cylinder, a viscous element, a thicker tube portion and a thinner tube portion. The forces, as generated by the voice coil motors in the directions x and y, are transmitted through a spindle and so on to the thicker tube portion. In response to these forces, the thicker tube portion rocks on the thinner tube portion. The leaf spring of the x- and y-direction zoom units realizes the zooming function by supporting a portion of the spindle elastically. <IMAGE></p>
申请公布号 EP0807799(B1) 申请公布日期 2002.10.09
申请号 EP19970107827 申请日期 1997.05.13
申请人 SEIKO INSTRUMENTS INC. 发明人 MASATOSHI, YASUTAKE;YUKIHIRO, SATO
分类号 F16F9/30;F16F9/52;G01B7/34;G01N27/00;G01Q10/02;G01Q10/04;G01Q70/02;H01J37/00;(IPC1-7):G01B7/34 主分类号 F16F9/30
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