发明名称 PLASMA REACTOR AND PLASMA REACTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a plasma reactor and a plasma reaction method which enables treatment based on stabilized reaction when a gas is made into plasma and the continuous treatment utilizing the energy of the plasma is performed. SOLUTION: This plasma reactor and plasma reaction method has such a constitution that electrodes of high potential side and low potential side are arranged in the reactor, inorganic dielectric material having a structure which allows the gas to flow between the electrodes is charged, the discharge is generated between the electrodes and the gas which exists between the electrodes is made plasma and is constituted so as to enable temperature control in the reactor.
申请公布号 JP2002292273(A) 申请公布日期 2002.10.08
申请号 JP20010103738 申请日期 2001.04.02
申请人 CANON INC 发明人 AOYANAGI HIROMI;NISHIGUCHI TOSHIMOTO;TAMURA JUNICHI
分类号 H05H1/24;B01J19/08;C07B61/00;H01J37/32 主分类号 H05H1/24
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