发明名称 Semiconductor wafer having a bank on a scribe line
摘要 A semiconductor wafer includes a plurality of chips arranged in a matrix and a plurality of scribe lines separating the chips from one another. A polyimide overcoat film covering each chip except for electrode pads of the chip has a bank crossing the scribe line for preventing the ground particles generated by grinding the bottom surface of the wafer from entering the chip along the scribe lines.
申请公布号 US6462401(B2) 申请公布日期 2002.10.08
申请号 US20010816229 申请日期 2001.03.26
申请人 NEC CORPORATION 发明人 FUJII MOYURU
分类号 H01L21/304;H01L21/301;H01L21/78;H01L23/31;(IPC1-7):H01L23/544 主分类号 H01L21/304
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