| 发明名称 |
Apparatus for automatically performing cleaning processes in a semiconductor wafer processing system |
| 摘要 |
A semiconductor wafer processing system with a multi-tasking sequencer control that performs an automatic cleaning process for the process chamber or chambers of the system.
|
| 申请公布号 |
US6460550(B2) |
申请公布日期 |
2002.10.08 |
| 申请号 |
US20000734152 |
申请日期 |
2000.12.11 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
NGUYEN THU VAN |
| 分类号 |
B08B3/04;H01L21/00;(IPC1-7):B08B3/04 |
主分类号 |
B08B3/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
