发明名称 Method and apparatus for selectively programming a semiconductor device
摘要 A method of programming a conductive semiconductor device having a plurality of conductive links by selective removal of all or portions of the conductive link using photolithographic and subtractive etching. Removal of only pre-selected conductive links is accomplished by use of a programmable array shutter to expose photoresist only above the conductive links to be removed.
申请公布号 US6461797(B1) 申请公布日期 2002.10.08
申请号 US19990443938 申请日期 1999.11.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LERCEL MICHAEL J.;RANKIN JED H.
分类号 H01L23/525;(IPC1-7):G03C5/56 主分类号 H01L23/525
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