发明名称 |
Method and apparatus for selectively programming a semiconductor device |
摘要 |
A method of programming a conductive semiconductor device having a plurality of conductive links by selective removal of all or portions of the conductive link using photolithographic and subtractive etching. Removal of only pre-selected conductive links is accomplished by use of a programmable array shutter to expose photoresist only above the conductive links to be removed.
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申请公布号 |
US6461797(B1) |
申请公布日期 |
2002.10.08 |
申请号 |
US19990443938 |
申请日期 |
1999.11.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LERCEL MICHAEL J.;RANKIN JED H. |
分类号 |
H01L23/525;(IPC1-7):G03C5/56 |
主分类号 |
H01L23/525 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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