SUBSTRATE AND MAGNETIC HEAD FOR THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a thin film magnetic head capable of downsizing and becoming denser to improve electric insulation, heat dissipation and surface smoothness. SOLUTION: The feature of this substrate for the thin film magnetic head is that the insulating film of 0.5-3 μm in thickness is formed on the silicon carbide material mainly composed of β type silicon carbide crystal with the surface roughness Ra of 1 nm or less, especially the surface roughness Ra on the insulating film of 100 nm or less is desirable.