发明名称 |
METHOD OF FORMING METALLIC CIRCUIT PATTERN |
摘要 |
PROBLEM TO BE SOLVED: To provide a method by which a metallic circuit pattern in which the adhesive strengths between a polyimide substrate and metallic circuit sections and the interline insulation resistance of a metallic circuit are improved can be formed. SOLUTION: After a photosensitive resin 3 is applied to a precursor layer 2 of polyimide resin formed on the polyimide substrate 1, a resin pattern mask 4 on which the precursor layer 2 of metallic circuit forming sections 5 is exposed is formed by exposing and developing the photosensitive resin 3, and plated undercoat cores are formed by irradiating the precursor layers 2 with ultraviolet rays 8 under the presence of a hydrogen donor 7. Then a metallic undercoat layer forming step of forming plated undercoat metallic layers 9 by electroless plating and a metallic circuit forming step are performed. The metallic circuit forming step is composed of plating for forming metallic circuit sections 5 on the plated undercoat metallic layers 9, the peeling of the resin pattern mask 4, imidization for imidizing the precursor layer 2 into a polyimide resin layer, and the removal of the precursor layer 2 or polyimide resin layer. |
申请公布号 |
JP2002290012(A) |
申请公布日期 |
2002.10.04 |
申请号 |
JP20010086874 |
申请日期 |
2001.03.26 |
申请人 |
TORAY ENG CO LTD;RAYTECH KK |
发明人 |
IZUMIDA SHINYA;ITO KOJI;KOYAMA MINORU;SUZUKI ATSUSHI |
分类号 |
C08K5/07;C08L79/08;C23C18/20;C25D7/00;H05K3/18;H05K3/38;H05K3/46;(IPC1-7):H05K3/18 |
主分类号 |
C08K5/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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