| 摘要 |
PURPOSE: A method for fabricating an electrostatic chuck adhering a dielectric layer directly is provided to apply the dielectric layer on a ceramic substrate without using an adhesive. CONSTITUTION: An electrode layer is formed on a ceramic substrate. A sintering process is performed. A slurry is formed by milling crystalline glass powder fabricated with a calcium oxide, alumina, silica, and a boron oxide. Air bubbles are removed from the slurry. The slurry is cast on the ceramic substrate by a tape. A dielectric layer is formed by drying the slurry. The dielectric layer and the electrode layer are sintered. The crystalline glass powder is formed with the calcium oxide of 33 weight percents, alumina of 17 weight percents, silica of 40 weight percents, and the boron oxide of 10 weight percents.
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