| 发明名称 |
Method of manufacturing oxide thin film for bolometer |
| 摘要 |
An oxide for use in a bolometer with an oxide thin-film formed is manufactured on an insulating substrate. Metal organic compound is dissolved in solvent to form solution during manufacturing the oxide thin-film. The solution is applied on the insulating substrate, and the applied solution is dried. A bond between carbon and oxygen is cut and decomposed by irradiating a laser ray with wavelength of 400 nm or less. A generated oxide is crystallized.
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| 申请公布号 |
US2002139776(A1) |
申请公布日期 |
2002.10.03 |
| 申请号 |
US20010984846 |
申请日期 |
2001.10.31 |
| 申请人 |
NEC CORPORATION |
发明人 |
TSUCHIYA TETSUO;MIZUTA SUSUMU;KUMAGAI TOSHIYA;YOSHITAKE TSUTOMU;SHIMAKAWA YUICHI;KUBO YOSHIMI |
| 分类号 |
C01G45/00;C23C8/10;C23C26/00;G01K17/00;H01L31/0264;H01L37/00;(IPC1-7):C23F1/00;B44C1/22;C03C15/00 |
主分类号 |
C01G45/00 |
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