PROBE FOR ELECTRO-OPTIC SAMPLING OSCILLOSCOPE

摘要

An electro-optic sampling probe is provided, capable of irradiating a plurality of excitation light beams on a plurality of light receiving portions mounted on an IC wafer which is an object for measurement. The electro-optic sampling probe comprises a plurality of excitation optical system modules which commonly uses an objective lens for condensing the excitation light beams on the IC wafer and a detachable portion for attaching and detaching the excitation optical system module, a second probe body for covering the optical path of a light beam emitted from the excitation optical system module is provided at the rear side of the IC wafer, and at least one of the plurality of excitation optical system modules have an optical axis which differs from those of other modules; thereby at least two excitation light beams can be irradiated on the light receiving portions on the IC wafer surface.