发明名称 |
Piezoelectric structure, liquid ejecting head and manufacturing method therefor |
摘要 |
A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure.
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申请公布号 |
US2002140320(A1) |
申请公布日期 |
2002.10.03 |
申请号 |
US20020071095 |
申请日期 |
2002.02.11 |
申请人 |
UNNO AKIRA;YONEHARA TAKAO;FUKUI TETSURO;MATSUDA TAKANORI;WASA KIYOTAKA |
发明人 |
UNNO AKIRA;YONEHARA TAKAO;FUKUI TETSURO;MATSUDA TAKANORI;WASA KIYOTAKA |
分类号 |
B41J2/045;B41J2/055;B41J2/14;B41J2/16;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H02N2/00;(IPC1-7):H01L41/08 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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