Contaminant library method and array plate

摘要

A method includes providing a substrate and depositing components of a test contaminant library onto regions of the substrate to form at least two test contaminant members of the library. In another method, a chemical cleaning solution is selected by combinatorial high throughput screening. In the method, components of a test contaminant library are deposited onto regions of a substrate to form at least two test contaminant members of the library. The substrate is cleaned with a cleaning solution and cleanliness of the substrate evaluated to select a cleaning solution for at least one of the contaminant members. In a final embodiment, the invention is a combinatorial high throughput screening array plate, comprising (A) a substrate and (B) a test contaminant library deposited on the substrate.