Manufacturing apparatus, control method of manufacturing apparatus, control system of manufacturing apparatus, computer readable recording medium with control program of manufacturing apparatus recorded therein and control program of manufacturing apparatus

摘要

There is disclosed a control system of a manufacturing apparatus, which controls a semiconductor manufacturing apparatus, comprising an interface which is connected to an exclusive-use circuit and which to transmits and receives information to and from the exclusive-use circuit, a processor which transmits at least one of recipe information and software for controlling the manufacturing apparatus to the manufacturing apparatus having an interface from the interface via the exclusive-use circuit, and a database which is connected to the processor and which stores at least one of the recipe information and software.