| 发明名称 |
MEASUREMENT TECHNOLOGY FOR VERY THIN FILM OXIDE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement technology for a very thin film. SOLUTION: The technology is a measurement technology for a very thin film more concretely which uses a monitor sample together with a device to be measured to accurately measure a deposited very thin film oxide of <=200Åin thickness.
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| 申请公布号 |
JP2002286442(A) |
申请公布日期 |
2002.10.03 |
| 申请号 |
JP20010393856 |
申请日期 |
2001.12.26 |
| 申请人 |
AGERE SYSTEMS GUARDIAN CORP |
发明人 |
DAUTARTAS MINDAUGAS FERNAND;PRZYBYLEK GEORGE JOHN |
| 分类号 |
C23C14/54;C23C16/52;G01B11/06;G01B21/08;H01L21/66;(IPC1-7):G01B21/08 |
主分类号 |
C23C14/54 |
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